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Fundamental Principles of Optical Lithography: The Science of Microfabrication

Chris Mack
ISBN: 978-0-470-01893-4
Hardcover
534 pages
January 2008
List Price: US $261.00
Government Price: US $150.36
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Fundamental Principles of Optical Lithography: The Science of Microfabrication (0470018933) cover image
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
Other Available Formats: Paperback

Laboratory Manual Click here to download the laboratory manual to accompany the textbook for free.

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