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Fundamental Principles of Optical Lithography: The Science of Microfabrication

ISBN: 978-0-470-01893-4
Hardcover
534 pages
January 2008
List Price: US $261.00
Government Price: US $150.36
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Fundamental Principles of Optical Lithography: The Science of Microfabrication (0470018933) cover image
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Other Available Formats: Paperback

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