Fundamental Principles of Optical Lithography: The Science of MicrofabricationISBN: 978-0-470-72730-0
Paperback
528 pages
December 2007
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
Other Available Formats: Hardcover
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By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.
This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.
Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances
the reader's understanding as the website supplies information on
how you can download a free laboratory manual, Optical Lithography
Modelling with MATLAB®, to accompany the textbook. You can
also contact the author and find help for instructors.