Fundamental Principles of Optical Lithography: The Science of Microfabrication

ISBN: 978-0-470-01893-4

Hardcover

534 pages

January 2008

List Price:	US $261.00
Government Price:	US $150.36
Enter Quantity: Buy

Fundamental Principles of Optical Lithography: The Science of Microfabrication (0470018933) cover image

This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.

Other Available Formats: Paperback

< >

Covers material required for a full semester course on optical lithography with principles, methods and future developments
Presents a thorough mathematical treatment of lithography, suitable for use in a graduate level course, with problems at the end of each chapter
Optional computer simulation exercises are included at the end of each chapter
Appropriate both to universities and to people in industry who need to self-teach themselves lithography
Presents an important industrial topic that accounts for approximately 30% of costs in the manufacturing of electronic devices
More author information and a free laboratory manual can be found at http://www.lithoguru.com/textbook/index.html