Wiley.com
Print this page Share

Handbook of Chemicals and Gases for the Semiconductor Industry

ISBN: 978-0-471-31671-8
Hardcover
384 pages
March 2002
List Price: US $296.50
Government Price: US $204.76
Enter Quantity:   Buy
Handbook of Chemicals and Gases for the Semiconductor Industry (0471316717) cover image
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 15-20 days delivery time. The book is not returnable.

The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing

The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need.

Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number.

The Handbook's eight chapters are:
Thin Film Deposition Materials
Wafer Cleaning Materials
Photolithography Materials
Wet and Dry Etching Materials
Chemical Mechanical Planarizing Methods
Carrier Gases
Uncategorized Materials
Semiconductor Chemicals Analysis

No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

Related Titles

More By These Authors

General Industrial Chemistry

by James G. Speight
by Paul T. Anastas, Paul H. Bickart, Mary M. Kirchhoff
Back to Top