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Handbook of Chemicals and Gases for the Semiconductor Industry

ISBN: 978-0-471-31671-8
Hardcover
384 pages
March 2002
List Price: US $296.50
Government Price: US $204.76
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Handbook of Chemicals and Gases for the Semiconductor Industry (0471316717) cover image
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Thin Film Deposition Materials.

Wafer Cleaning Chemicals.

Photolithography Materials.

Wet and Dry Etching Materials.

Chemical Mechanical Planarizing Materials.

Carrier Gases.

Uncategorized Materials.

Semiconductor Chemicals Analysis.

Index.

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