Handbook of Chemicals and Gases for the Semiconductor IndustryISBN: 978-0-471-31671-8
Hardcover
384 pages
April 2002
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ASHUTOSH MISRA is Director of Applications and New Product Development for Air Liquide Electronics, Inc.
JEREMIAH D. HOGAN is Director of Physical Analysis Laboratories for Texas Instruments, Inc.
RUSSELL A. CHORUSH is an associate at the law firm of Conley, Rose and Tayon, PC