Fundamental Principles of Optical Lithography: The Science of MicrofabricationISBN: 978-0-470-72730-0
Paperback
528 pages
December 2007
 This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
Other Available Formats: Hardcover
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- Covers material required for a full semester course on optical lithography with principles, methods and future developments
- Presents a thorough mathematical treatment of lithography, suitable for use in a graduate level course, with problems at the end of each chapter
- Optional computer simulation exercises are included at the end of each chapter
- Appropriate both to universities and to people in industry who need to self-teach themselves lithography
- Presents an important industrial topic that accounts for approximately 30% of costs in the manufacturing of electronic devices
- More author information and a free laboratory manual can be found at http://www.lithoguru.com/textbook/index.html
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