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Fundamental Principles of Optical Lithography: The Science of Microfabrication

Chris Mack
ISBN: 978-0-470-72730-0
Paperback
528 pages
December 2007
List Price: US $89.50
Government Price: US $60.76
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Fundamental Principles of Optical Lithography: The Science of Microfabrication (0470727306) cover image
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
Other Available Formats: Hardcover

Chris A. Mack, Vice-President of Lithography Technology, Lithoguru.com.

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