Dielectric Films for Advanced MicroelectronicsISBN: 978-0-470-01360-1
Hardcover
512 pages
March 2007
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
|
The topic of thin films is an area of increasing importance in
materials science, electrical engineering and applied solid state
physics; with both research and industrial applications in
microelectronics, computer manufacturing, and physical devices.
Advanced, high-performance computers, high-definition TV, broadband
imaging systems, flat-panel displays, robotic systems, and medical
electronics and diagnostics are a few examples of the miniaturized
device technologies that depend on the utilization of thin film
materials.
This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.