Wiley.com
Print this page Share

Dielectric Films for Advanced Microelectronics

Mikhail Baklanov (Editor), Karen Maex (Editor), Martin Green (Editor)
ISBN: 978-0-470-01360-1
Hardcover
512 pages
March 2007
List Price: US $320.25
Government Price: US $221.40
Enter Quantity:   Buy
Dielectric Films for Advanced Microelectronics (0470013605) cover image
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.

Series Preface.

Preface. (Mikhail Baklanov, Martin Green and Karen Maex).

1. Low and Ultralow Dielectric Constant Films Prepared by Plasma-Enhanced Chemical Vapor Deposition. (A. Grill).

2. Spin-On Dielectric Materials. (Geraud Dubois, Willi Volksen and Robert D. Miller).

3.Porosity of Low Dielectric Constant Materials.

3.1 Positron Annihilation Spectroscopy. (David W. Gidley, Hua-Gen Peng, and Richard Vallery).

3.2Structure Characterization of Nanoporous Interlevel Dielectric Thin Films with X-ray and Neutron Radiation. (Christopher L. Soles, Hae-Jeong Lee, Bryan D. Vogt, Eric K. Lin, Wen-li Wu).

3.3 Ellipsometric Porosimetry. (M. R. Baklanov).

4.Mechanical and Transport Properties of Low-k Dielectrics. (J.L. Plawsky, R. Achanta, W. Cho, O. Rodriguez, R. Saxena, and W.N. Gill).

5. Integration of low-k dielectric films in damascene processes. (R.J.O.M. Hoofman, V.H. Nguyen,V. Arnal, M. Broekaart, L.G. Gosset,W.F.A. Besling, M. Fayolle and F. Iacopi).

6. ONO structures and oxynitrides in modern microelectronics. Material science, characterization and application. (Yakov  Roizin  and Vladimir  Gritsenko).

High Dielectric constant Materials.

7. Material Engineering of High-k Gate Dielectrics. (Akira Toriumi and Koji Kita).

8. Physical Characterisation of ultra-thin high-k dielectric. (T. Conard, H. Bender and W. Vandervorst).

9. Electrical Characterization of Advanced Gate Dielectrics. (Robin Degraeve, Jurriaan Schmitz, Luigi Pantisano, Eddy Simoen, Michel Houssa, Ben Kaezer, and Guido Groeseneken).

Medium dielectric constant materials.

10. Integration Issues of High-k Gate Dielectrics. (Yasuo Nara).

Dielectric films for interconnects (packaging).

11. Anisotropic Conductive Film (ACF) for Advanced Microelectronic Interconnects. (Yi Li, C. P. Wong).

Index.

Related Titles

More From This Series

by Peter Capper (Editor), James Garland (Editor), Safa O. Kasap (Series Editor), Arthur Willoughby (Series Editor)
by Sadao Adachi, Peter Capper (Series Editor), Safa O. Kasap (Series Editor), Arthur Willoughby (Series Editor)
by Ricardo S. Sussmann (Editor)
by Peter Capper (Editor), Michael Mauk (Editor)

Thin Films, Surfaces & Interfaces

by John C. Vickerman (Editor), Ian S. Gilmore (Editor)
Back to Top