Dielectric Films for Advanced MicroelectronicsISBN: 978-0-470-01360-1
Hardcover
512 pages
March 2007
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
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"The book is well organized and has excellent technical depth with recent state-of-the-art information. Researchers, graduate students, and those in industry working on finding new materials and processes for thin-film dielectric materials would find this book to be a valuable resource." (IEEE Electrical Insulation Magazine, March/April 2009)