Cold Plasma Materials Fabrication: From Fundamentals to ApplicationsISBN: 978-0-7803-4714-4
Paperback
272 pages
April 1994, Wiley-IEEE Press
 This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
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Preface.
List of Symbols.
Fundamentals of Plasma.
Cold Plasma Generation.
Plasma Chemistry.
Plasma Reactors.
Plasma Diagnostics.
Cold Plasma Processes for Surface Modification.
Deposition of Coatings by PECVD.
Plasma Assisted Etching.
Index.
About the Author.
List of Symbols.
Fundamentals of Plasma.
Cold Plasma Generation.
Plasma Chemistry.
Plasma Reactors.
Plasma Diagnostics.
Cold Plasma Processes for Surface Modification.
Deposition of Coatings by PECVD.
Plasma Assisted Etching.
Index.
About the Author.
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