Vapor Surface TreatmentsISBN: 978-1-84821-171-1
Hardcover
390 pages
December 2009, Wiley-ISTE
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Applications include advanced semiconductors, optics, and nanotechnology, as well as many more. This book details the most important techniques used in industrial applications, providing coverage from the basic physics to the technical details of each, with emphasis on the macroscopic engineering of the processes and the microscopic characterization of the produced coatings.
Vacuum evaporation, cathodic sputtering and ion implantation
produce thin films mainly by physical interactions; gas
cementation, nitridation, carbonitridation and pack cementation
produce thicker surface modifications involving chemical reactions.
A section of the book is devoted to chemical vapor deposition (CVD)
processes, with dedicated chapters dealing with i) principles and
industrial applications, ii) the use of plasma and lasers to assist
deposition, and iii) macroscopic modeling of reactors. Alain
Galerie has drawn contributions from leading experts at top
research universities to produce a complete overview of the vapor
phase surface treatments which have an increasing role in modern
surface engineering.