Textbook
Principles of Plasma Discharges and Materials Processing, 2nd EditionISBN: 978-0-471-72001-0
Hardcover
800 pages
April 2005, ©2005
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 15-20 days delivery time. The book is not returnable.
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1. Introduction.
2. Basic Plasma Equations and Equilibrium.
3. Atomic Collisions.
4. Plasma Dynamics.
5. Diffusion and Transport.
6. DC Sheaths.
7. Chemical Reactions and Equilibrium.
8. Molecular Collisions.
9. Chemical Kinetics and Surface Processes.
10. Particle and Energy Balance in Discharges.
11. Capacitive Discharges.
12. Inductive Discharges.
13. Wave-Heated Discharges.
14. DC Discharges.
15. Etching.
16. Deposition and Implantation.
17. Dusty Plasmas.
18. Kinetic Theory of Discharges.
Appendix A: Collision Dynamics.
Appendix B: The Collision Integral.
Appendix C: Diffusion Solutions for Variable Mobility Model.