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ULSI Semiconductor Technology Atlas

Chih-Hang Tung, George T. T. Sheng, Chih-Yuan Lu
ISBN: 978-0-471-45772-5
Hardcover
680 pages
October 2003
List Price: US $243.25
Government Price: US $168.28
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ULSI Semiconductor Technology Atlas (0471457728) cover image
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.

CHIH-HANG TUNG is a senior member of the technical staff and Project Leader at the Institute of Microelectronics in Singapore.

GEORGE T. T. SHENG was the first to develop cross-sectioning samples of TEM studies of semiconductor devices and has been involved with many other groundbreaking projects at Bell Labs.

CHIH-YUAN LU is Chairman and CEO of Ardentec Corp., an ULSI testing service company. He is also CTO of Macronix International Co., Ltd., the eighth largest worldwide NVM semiconductor company.

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