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Textbook

Fundamentals of Semiconductor Fabrication

Gary S. May, Simon M. Sze
ISBN: 978-0-471-23279-7
Paperback
320 pages
April 2003, ©2004
List Price: US $156.95
Government Price: US $110.04
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Resources for Instructors

Solutions
Solutions manual is on a password protected Web site. Site includes figures from the text and additional process simulation exercises.

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