Textbook
Introduction to Microfabrication, 2nd EditionISBN: 978-0-470-74983-8
Hardcover
536 pages
October 2010, ©2010
This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 15-20 days delivery time. The book is not returnable.
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Introduction to Mictrofabrication Visit for solutions to homework problems as well as PDF slides of the figures and tables