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Introduction to Microfabrication, 2nd Edition

ISBN: 978-0-470-74983-8
Hardcover
536 pages
October 2010, ©2010
List Price: US $94.50
Government Price: US $63.96
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Introduction to Microfabrication, 2nd Edition (0470749830) cover image
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Professor Sami Franssila, Helsinki University of Technology, Finland
Sami Franssila has taught courses on microfluidics, bioMEMs, microsystems, nanoscience, silicon microtechnology and thin-film technology at Helsinki University of Technology since 1998. He is group leader of the Microfabrication group at Micronova, the Centre for Micro and Nanotechnology which is run jointly by the VTT Technical Research Centre of Finland and Helsinki University of Technology.
Professor Franssila researches into micro- and nanofabrication for fluidic, chemical and biological devices, chemical microsystems and thin film technology.
He has authored or co-authored over 60 peer reviewed articles, 120 international conference papers and written one textbook Introduction to Microfabrication, published by John Wiley & Sons in 2004.

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