Micro-Manufacturing: Design and Manufacturing of Micro-ProductsISBN: 978-0-470-55644-3
Hardcover
404 pages
May 2011
 This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
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Foreword vii
Contributors ix
1 Fundamentals of Micro-Manufacturing 1
2 Micro-Fabrication Processes in Semiconductor Industry 25
3 Modeling and Analysis at Micro-Scales 43
4 Metrology, Inspection, and Process Control in Micro-Scales 71
5 Micro-Layered Manufacturing 97
6 Micro-Laser Processing 159
7 Polymer Micro-Molding/Forming Processes 197
8 Mechanical Micro-Machining 235
9 Micro-Forming 275
10 Micro-Electro Discharge Machining (μEDM) 301
11 Metal Injection Molding at Micro-Scales (μMIM) 347
Index 371
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