Surfaces, Interfaces, and Films for Microelectronics

Part I: Fundamentals of Surfaces and Interfaces.

1. Introduction to Surfaces.

2. Structure of Surfaces.

3. Thermodynamics of Surfaces and Interfaces.

4. Surface Roughness.

5. Surface electronic States.

6. Other Surface Probes.

7. Charged Surfaces.

8.Adsorption.

9. Elliposometry and Optical Properties of Surfaces, Interfaces, and Films.

Part II: Microelectronics Applications.

10. Films and Interfaces.

11. Electronic Passivation of Semiconductor-Dielectric Film Interfaces.

12. The Si-SiO₂ Interface and Other MOSFET Interfaces.

Index.