Surfaces, Interfaces, and Films for MicroelectronicsISBN: 978-0-470-17447-0
Hardcover
536 pages
February 2008
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- Provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing
- Explores the fast-growing field of microelectronics in a readily accessible manner for the reader who requires self-study
- Authored by an expert in the field, and based on over 25 years of teaching experience in this subject
- Offers a unique blend of fundamental science, processing and applications
- Includes exercises to guide the student and a liberal addition of microelectronic applications
- Provides extensive references to the primary literature to guide readers in understanding microelectronic materials as well as design new materials and applications
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