MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd EditionISBN: 978-0-470-08301-7
Hardcover
576 pages
March 2008
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- Expanded coverage of microfabrication and assembly & packaging technologies.
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Numerous chapter-end problems and exercises help students understand the processes and engineers apply them on the job.
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Completely new chapter on nanotechnology and nano-scale engineering.
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