MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd EditionISBN: 978-0-470-08301-7
Hardcover
576 pages
March 2008
|
Tai-Ran Hsu, PhD, is a Professor in the Department of Mechanical and Aerospace Engineering, San Jose State University, California. Dr. Hsu is the author of the earlier edition of this book, which is considered one of the bestselling textbooks on the subject of MEMS.