Lithography

ISBN: 978-1-84821-202-2

Hardcover

320 pages

December 2010, Wiley-ISTE

List Price:	US $176.75
Government Price:	US $122.20
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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

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