RF MEMS and Their ApplicationsISBN: 978-0-470-84308-6
Hardcover
376 pages
December 2002
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Microelectromechanical systems (MEMS) refer to a collection of
micro-sensors and actuators, which can react to environmental
change under micro- circuit control. The integration of MEMS into
traditional Radio Frequency (RF) circuits has resulted in systems
with superior performance levels and lower manufacturing costs. The
incorporation of MEMS based fabrication technologies into micro and
millimeter wave systems offers viable routes to ICs with MEMS
actuators, antennas, switches and transmission lines. The resultant
systems operate with an increased bandwidth and increased radiation
efficiency and have considerable scope for implementation within
the expanding area of wireless personal communication devices. This
text provides leading edge coverage of this increasingly important
area and highlights the overlapping information requirements of the
RF and MEMS research and development communities.
* Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors
* Includes coverage of MEMS devices for wireless and Bluetooth enabled systems
Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.
* Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors
* Includes coverage of MEMS devices for wireless and Bluetooth enabled systems
Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.