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Lithography

Stefan Landis (Editor)
ISBN: 978-1-84821-202-2
Hardcover
320 pages
December 2010, Wiley-ISTE
List Price: US $176.75
Government Price: US $122.20
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Lithography (184821202X) cover image

Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.

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