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Analysis of Microelectronic Materials and Devices

M. Grasserbauer (Editor), H. W. Werner (Editor)
ISBN: 978-0-471-95013-4
Paperback
976 pages
May 1995
List Price: US $266.25
Government Price: US $153.56
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Analysis of Microelectronic Materials and Devices (0471950130) cover image

Bulk Analysis of Microelectronic Materials.

Analysis of Surfaces, Interfaces and Thin Films.

Structure Analysis on an Atomic Scale.

Physical, Electrical and Geometrical Characterization.

Index.

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