Cleanroom Design, 2nd Edition

An Introduction to the Design of Clean and Containment Areas (W. Whyte).

International Standards for the Design of Cleanrooms (Å. Möller).

The Design of Cleanrooms for the Microelectronics Industry (J. King).

The Design of Cleanrooms for the Pharmaceutical Industry (G. Farquharson & W. Whyte).

The Design of Cleanrooms for the Medical Device Industry (H. Schicht).

Contamination Control Facilities for the Biotechnology Industry (P. Tubito & T. Latham).

Cost-Efficiency and Energy-Saving Concepts for Cleanrooms (H. Schicht).

High Efficiency Air Filtration (S. Klocke & W. Whyte).

Construction Materials and Surface Finishes for Cleanrooms (E. Sirch).

Purification Techniques for Clean Water (T. Hodgkiess).

The Design of an Ultra-Pure Water System for Use in the Manufacture of Integrated Circuits (R. Galbraith).

The Production and Transmission of High Purity Gases for the Semiconductor Industry (R. Galbraith).

Materials for Services Pipework (T. Hodgkiess).

Index.