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Textbook

Microsensors, MEMS, and Smart Devices

Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
ISBN: 978-0-471-86109-6
Hardcover
522 pages
December 2001, ©2001
List Price: US $170.00
Government Price: US $117.72
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Introduction

Electronic Materials and Processing

MEMS Materials and their Preparation

Standard Microelectronic Technologies

Silicon Micromachining:Bulk

Silicon Micromachining: Surface

Microstereolithography for MEMS

Microsensors

Introduction to SAW Devices

Surface Acoustic Waves in Solids

IDT Microsensor Parameter Measurement

IDT Microsensor Fabrication

IDT Microsensors

MEMS-IDT Microsensors

Smart Sensors and MEMS

Appendices

Index

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