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SemiConductor Wafer Bonding: Science and Technology

ISBN: 978-0-471-57481-1
Hardcover
320 pages
December 1998
List Price: US $222.50
Government Price: US $127.96
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SemiConductor Wafer Bonding: Science and Technology (0471574813) cover image
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Basics of Interactions Between Flat Surfaces.

Influence of Particles, Surface Steps, and Cavities.

Surface Preparation and Room-Temperature Wafer Bonding.

Thermal Treatment of Bonded Wafer Pairs.

Thinning Procedures.

Electrical Properties of Bonding Interfaces.

Stresses in Bonded Wafers.

Bonding of Dissimilar Materials.

Bonding of Structured Wafers.

Mainstream Applications.

Emerging and Future Applications.

Index.
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