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Semiconductor Sensors

Simon M. Sze (Editor)
ISBN: 978-0-471-54609-2
Hardcover
576 pages
November 1994
List Price: US $235.00
Government Price: US $156.76
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Semiconductor Sensors (0471546097) cover image

An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

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