Handbook of Infrared Spectroscopy of Ultrathin FilmsISBN: 978-0-471-35404-8
Hardcover
710 pages
June 2003
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Preface.
Acronyms and Symbols.
Introduction.
1. Absorption and Reflection of Infrared Radiation by.Ultrathin Films.
2. Optimum Conditions for Recording Infrared Spectra of Ultrathin Films.
3. Interpretation of IR Spectra of Ultrathin Films.
4. Equipment and Techniques 307.
5. Infrared Spectroscopy of Thin Layers in Silicon Microelectronics.
6. Application of Infrared Spectroscopy to Analysis of Interfaces and Thin Dielectric Layers in Semiconductor Technology.
7. Ultrathin Films at Gas-Solid, Gas-Liquid, and Solid-Liquid Interfaces.
Appendix.
References.
Index.
Acronyms and Symbols.
Introduction.
1. Absorption and Reflection of Infrared Radiation by.Ultrathin Films.
2. Optimum Conditions for Recording Infrared Spectra of Ultrathin Films.
3. Interpretation of IR Spectra of Ultrathin Films.
4. Equipment and Techniques 307.
5. Infrared Spectroscopy of Thin Layers in Silicon Microelectronics.
6. Application of Infrared Spectroscopy to Analysis of Interfaces and Thin Dielectric Layers in Semiconductor Technology.
7. Ultrathin Films at Gas-Solid, Gas-Liquid, and Solid-Liquid Interfaces.
Appendix.
References.
Index.