Physical Vapor Deposition of Thin FilmsISBN: 978-0-471-33001-1
Hardcover
340 pages
February 2000
 This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 15-20 days delivery time. The book is not returnable.
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Introduction to Physical Vapor Deposition.
The Kinetic Theory of Gases.
Adsorption and Condensation.
Principles of High Vacuum.
Evaporation Sources.
Principles of Sputtering Discharges.
Sputtering.
Film Deposition.
Index.
The Kinetic Theory of Gases.
Adsorption and Condensation.
Principles of High Vacuum.
Evaporation Sources.
Principles of Sputtering Discharges.
Sputtering.
Film Deposition.
Index.
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