A User's Guide to Vacuum Technology, 3rd EditionISBN: 978-0-471-27052-2
Hardcover
536 pages
July 2003
Other Available Formats: E-book
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In the decade and a half since the publication of the Second
Edition of A User?s Guide to Vacuum Technology there have
been many important advances in the field, including spinning rotor
gauges, dry mechanical pumps, magnetically levitated turbo pumps,
and ultraclean system designs. These, along with improved cleaning
and assembly techniques have made contamination-free manufacturing
a reality. Designed to bridge the gap in both knowledge and
training between designers and end users of vacuum equipment, the
Third Edition offers a practical perspective on today?s vacuum
technology. With a focus on the operation, understanding, and
selection of equipment for industrial processes used in
semiconductor, optics, packaging, and related coating technologies,
A User?s Guide to Vacuum Technology, Third Edition provides
a detailed treatment of this important field. While emphasizing the
fundamentals and touching on significant topics not adequately
covered elsewhere, the text avoids topics not relevant to the
typical user.