Spectroscopic Ellipsometry and Reflectometry: A User's GuideISBN: 978-0-471-18172-9
Hardcover
248 pages
March 1999
 This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
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Perspective and History.
Fundamentals.
Optical Properties of Materials and Layered Structures.
Instrumentation.
The Anatomy of a Reflectance Spectrum.
Aspects of Single-Wavelength Ellipsometry.
The Anatomy of an Ellipsometric Spectrum.
Analytical Methods and Approach.
Optical Data Analysis.
Quality Assurance.
Very Thin Films.
Roughness.
Appendices.
Index.
Fundamentals.
Optical Properties of Materials and Layered Structures.
Instrumentation.
The Anatomy of a Reflectance Spectrum.
Aspects of Single-Wavelength Ellipsometry.
The Anatomy of an Ellipsometric Spectrum.
Analytical Methods and Approach.
Optical Data Analysis.
Quality Assurance.
Very Thin Films.
Roughness.
Appendices.
Index.
Related Titles
Special Topics
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