Glow Discharge Processes: Sputtering and Plasma EtchingISBN: 978-0-471-07828-9
Hardcover
432 pages
September 1980
 This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
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Gases.
Gas Phase Collision Processes.
Plasmas.
DC Glow Discharges.
RF Discharges.
Sputtering.
Plasma Etching.
Appendices.
Index.
Gas Phase Collision Processes.
Plasmas.
DC Glow Discharges.
RF Discharges.
Sputtering.
Plasma Etching.
Appendices.
Index.
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