Scanning Auger Electron Microscopy

Preface.

Acknowledgments.

1. Introduction (M.M. El Gomati and M. Prutton).

2. The Auger Process (J.A.D. Matthew).

3. Instrumentation (M.M. El Gomati and M. Prutton).

4. The Spatial Resolution (M.M. El Gomati).

5. Forming an Auger Image (M.M. El Gomati and M. Prutton).

6. Image Processing and Interpretation (M. Prutton).

7. Quantification of Auger Images (M. Prutton).

8. Applications: Materials Science (R.K. Wild).

9. Applications: Semiconductor Manufacturing (C.F.H. Gondran).

10. Concluding Remarks (M.M. El Gomati and M. Prutton).

Author Index.

Subject Index.