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RF MEMS and Their Applications

Vijay K. Varadan, K. J. Vinoy, K. A. Jose
ISBN: 978-0-470-84308-6
Hardcover
376 pages
December 2002
List Price: US $215.25
Government Price: US $124.12
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RF MEMS and Their Applications (047084308X) cover image

Preface.

Microelectromechanical Systems (MEMS) and Radio Frequency MEMS.

MEMS Materials and Fabrication Techniques.

RF MEMS Switches and Micro Relays.

MEMS Inductors and Capacitors.

Micromachined RF Filters.

Micromachined  Phase Shifters.

Micromachined Transmission Lines and Components.

Micromachined Antennae.

Integration and Packaging for RF MEMS Devices.

Index.

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