EUV LithographyISBN: 978-0-470-47155-5
Hardcover
702 pages
December 2008
 This is a Print-on-Demand title. It will be printed specifically to fill your order. Please allow an additional 10-15 days delivery time. The book is not returnable.
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Vivek Bakshi is the President of EUV Litho, Inc. He was previously a senior member of the technical staff of Sematech, Inc.
Dr. Bakshi studied at the University of Texas at Austin; the University of Idaho; and the Indian Institute of Technology at Kanpur.
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