Scaling Issues and Design of MEMSISBN: 978-0-470-01699-2
Hardcover
244 pages
February 2008
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Salvatore Castorina, Electrical and Electronic Measurements Group, University of Catania. Salvatore Castorina is co-author of over 20 scientific papers and his research interests include micro and nano electromechanical systems, magnetic and thermal, micro sensors and micro actuators, micro and nano robotics.
Luigi Fortuna, Professor of System Theory, University of Catania. Luigi Fortuna has published more than 280 technical papers and his interests include nonlinear science and complexity, chaos and cellular neural networks.
NicolòSavalli, Engineering Faculty, University of Catania. Nicolò Savalli teaches courses in Measurement Theory and Measurement Applications and is co-author of more than 35 scientific publications. His research interests include micro-electro-mechanical-systems (MEMS) and micro-opto-electro-mechanical-systems (MOEMS).