Spectroscopic Ellipsometry: Principles and Applications

Preface.

Acknowledgments.

1 Introduction to Spectroscopic Ellipsometry.

1.1 Features of Spectroscopic Ellipsometry.

1.2 Applications of Spectroscopic Ellipsometry.

1.3 Data Analysis.

1.4 History of Development.

1.5 Future Prospects.

References.

2 Principles of Optics.

2.1 Propagation of Light.

2.2 Dielectrics.

2.3 Reflection and Transmission of Light.

2.4 Optical Interference.

References.

3 Polarization of Light.

3.1 Representation of Polarized Light.

3.2 Optical Elements.

3.3 Jones Matrix.

3.4 Stokes Parameters.

References.

4 Principles of Spectroscopic Ellipsometry.

4.1 Principles of Ellipsometry Measurement.

4.2 Ellipsometry Measurement.

4.3 Instrumentation for Ellipsometry.

4.4 Precision and Error of Measurement.

References.

5 Data Analysis.

5.1 Interpretation of (Ψ, Δ).

5.2 Dielectric Function Models.

5.3 Effective Medium Approximation.

5.4 Optical Models.

5.5 Data Analysis Procedure.

References.

6 Ellipsometry of Anisotropic Materials.

6.1 Reflection and Transmission of Light by Anisotropic Materials.

6.2 Fresnel Equations for Anisotropic Materials.

6.3 4×4 Matrix Method.

6.4 Interpretation of (Ψ, Δ) for Anisotropic Materials.

6.5 Measurement and Data Analysis of Anisotropic Materials.

References.

7 Data Analysis Examples.

7.1 Insulators.

7.2 Semiconductors.

7.3 Metals/Semiconductors.

7.4 Organic Materials/Biomaterials.

7.5 Anisotropic Materials.

References.

8 Real-Time Monitoring by Spectroscopic Ellipsometry.

8.1 Data Analysis in Real-Time Monitoring.

8.2 Observation of Thin-Film Growth by Real-Time Monitoring.

8.3 Process Control by Real-Time Monitoring.

References.

Appendices.

1 Trigonometric Functions.

2 Definitions of Optical Constants.

3 Maxwell’s Equations for Conductors.

4 Jones–Mueller Matrix Conversion.

5 Kramers–Kronig Relations.

Index.