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Textbooks & Course Offerings in MEMS (3)

Introduction to Microfabrication, 2nd Edition (0470749830) cover image
Textbook
Introduction to Microfabrication, 2nd Edition
by Sami Franssila
October 2010, ©2010, Hardcover
Introduction to Microsystem Technology: A Guide for Students (0470058617) cover image
Textbook
Introduction to Microsystem Technology: A Guide for Students
by Gerald Gerlach, Wolfram Dotzel, Dorte Muller (Translated by)
April 2008, ©2008, Hardcover
Microsensors, MEMS, and Smart Devices (047186109X) cover image
Textbook
Microsensors, MEMS, and Smart Devices
by Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim
December 2001, ©2001, Hardcover